Parameter

Grade I

Grade II

Grade III

Grade IV

Conductivity µS/cm, 25oC

0.056

1

4

5

Resistivity, 25oC

18.2

1

0.25

0.2

MΩ.cm

TOC (μg/L)

50

50

200

N/A

Total Silica (μg/L)

3

3

500

N/A

Sodium (μg/L)

1

5

10

50

Chlorides (μg/L)

1

5

10

50

pH

N/A

N/A

N/A

5月8日

Special requirements for reagent Grade Water

Distillation or equal process followed by ion exchange and 0.2 µm filter

Distillation or equal process followed by ion exchange

0.45 µm filter

Bacteria (CFU/mL)

10/1000

10/100

100/10

Endotoxin (IU/mL)

<0.03

0.25

N/A